Custom Systems
Excimer    
Laser Processing System
Sixteen Axes of Motion

 

  • Motorized Zoom optics.
  • Motorized Laser beam-steering system.
  • Motorized Laser beam attenuator for power level control.
  • Motorized aperture controlling width, height and angle of
  • the laser beam.
  • Beam Homoginizer for uniform beam intensity.
  • Integrated Beam Analyzer and Power Meter.
  • Fully automated initialization, calibration and process
  • sequences.
  • Custom fixture to clamp and align part.
  • Integrated vision processing for alignment and focusing.
 
     
Opens Repair Tool   Nine Axes of Motion
     

     

  • Laser and UltraSonics controlled for process operation.
  • Dual Z channels (Optical channel for viewing, setup. Secondary Z channel for running the process).
  • Motorized Zoom.
  • 6 Axis stage (X,Y and Z for substrate, X,Y and R for gold straps).
  • Custom fixture to clamp and align part.

    Custom software Dedicated user interface, fully integrated with the customer’s production control system.
  
     
Defect Locator Tool   Four Axes of Motion
     
  • Compound linear motor stage.
  • Motorized turret with ring-lights attached to each objective.
  • Integrated a light curtain for operator safety.
  • Complex fixture to handle multiple sizes of ceramic substrates as well as mounts for two different sized wafers.
  • Integrated vision system for fiducial detection and feature detection.
  
     
Robotic Laser Processing Tool   Five Axes of Motion
     
  • Galvo controlled laser processing through an objective.
  • Pattern-recognition to find the area-of-interest for laser processing.
    • Custom optical path design which included:
      Dual camera system with different fields-of-view.
    • LED lighting system.
    • Laser path with high-speed shutter, attenuator and beam
    • expander.
    • Laser-AutoFocus system to allow the motion controller to keep the surface in focus.

  • Custom stage. This system had a linear motor control for the X axis, a stepper motor control for the Y axis and a Voice-coil motor control for the Z axis.