The vertical translation stage provides accurate & repeatable vertical motion with the ability to support & move heavy loads. It is designed to be easily integrated into multi-axis assemblies with JMAR Precision Systems’ advanced linear motor stages.
 
 
Applications
  
   
   
Benefits
  

Wafer Probing

Wafer Inspection

Film Thickness Metrology

Bio-Chip Manufacturing

FT-IR Spectroscopy

BGA Inspection

Integrated Circuit Manufacturing

Probe Card Testing

 


Small Footprint

High Speed

High Force &
Load Capacity

Excellent Accuracy & Repeatability

 

Standard Features

High Resolution
Linear Encoder

Truck & Rail Recirculating Bearings

Precision Ball-Screw Drive

       
For Z-Wedge PDF File, click here

SPECIFICATIONS
Configurations  
Travel: 0.50”
Resolution 0.1 mm standard (0.2 mm, 0.5 mm, 1mm available)
Overtravel: 0.025” at each end
   
Performance
Specifications		  
Straightness: +/-1mm (X or Y)
Linear Accuracy: <1mm (with 0.1mm encoder)
Ballscrew Lead: up to 2.5mm
Ballscrew Diameter: 10mm
Wedge Ratio: 2:1 (horizontal : vertical)
Maximum Velocity: 2” per second
Load Capacity: 100 lb.
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  *At calibrated temperature
For Z-Wedge PDF File, click here