Disk Inspection Systems

(DIS) Inspection differs from measurement in that the results of the process are qualitative rather than quantitative. These systems are designed to look for defects such as contamination, chips, scratches, stains, discoloration, and other flaws. Defect inspection may be as simple as presenting the site of a potential defect to an operator for evaluation, or as sophisticated as using an image processor to automatically detect and categorize defects on a part.

Disk Head Inspection
Inspection of very small parts such as disk heads requires precision part placement, digitally controlled lighting, instantaneous laser autofocus, and active air isolation for vibration control. An ergonomically designed, small footprint workstation is also incorporated into this inspection system.

Galaxy™
Disk media for computer hard drives presents the problem of circular geometry as well as locating extremely small defects on a relatively large surface. A precision rotary table with a vacuum chuck mounted on a standard X-Y stage provides the solution in this inspection application.

Semiconductor Wafer/Circuit Inspection
Inspecting semiconductor circuits or wafers utilizing extremely high power optics requires highly precise stage positioning and a high resolution video camera system. This system also provides active air isolation for vibration control. The system is controlled from a keyboard, mouse, and joystick, enabling the operator to easily structure and edit inspection routines. Hard copy output and video archiving are available.

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